Grip Smarter, Move Faster
Characteristics of Wafer grippers
Microstructures for wafer handling are specialized structures mostly used in the semiconductor industry.
Their main function is to grip and transfer sensitive silicon wafers precisely and securely without damaging their surface or introducing impurities.
These microstructures are characterized by their ability to transfer high shear forces, allowing higher accelerations and speeds to be achieved in the handling process.
Normal adhesion, in comparison to other INNOCISE microstructures, is minimized. This has the advantage that the wafer pick-up and placement process is extremely low-stress for the wafer.
Key Features
Product Portfolio
Here you can find microstructure options that have been developed for wafer handling and can be adapted to your needs.
other adaptions possible!
Setup for vibration tests pick and place
To validate and further improve the performance of Wafer Gripper microstructures, INNOCISE has developed special test setups using various sensors and high-resolution camera systems.
This enables the measurement of shear forces, acceleration during wafer placement and the placement accuracy.
These measurements help with gathering information about important properties of the microstructures, that are relevant for their use in different applications in order to ensure reliable performance and quality.
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To ensure the best possible solution for your application, we need some key details—since our technology’s effectiveness depends on the specific parameters of both the object and the process. If you have a specific object in mind, please provide the following information so we can tailor our approach to your needs. We will be in touch right away to discuss your application in further detail!
Looking for a personal consultation?
Discuss your process requirements with one of our experts.
We will be happy to answer your questions about integrating our gripping solution into your next project.
Yolanda Stabel
Business Development Manager
Kathi Koltes
Sales Engineer